Engineering

We strive to support our customers in the best way possible and therefore offer our engineering expertise in three different ways:

- as a service provider at/for customers
- as a developer of sub-processes or autonomous project packages
- as a general contractor for turn-key systems

As a result, we are well positioned to operate as both a supporting specialist or as a manager overseeing partial or full project responsibility for the customer.

MES

A MES might be seen as an intermediate step between, on the one hand, an enterprise resource planning (ERP) system, and a supervisory control and data acquisition (SCADA) or process control system on the other and is usually a special adapted application. Here we have programmed a solution between SAP® and a production line based on Siemens PLC.

VPD and OVPD (Organic - Vapor Phase Deposition) are technologies to produce organic electronics like OLEDs by deposit of special semiconductor materials. The Organic Electronic Cluster (OEC) is based on this technologies and offers a wide range of process modules needed in the field. We have taken over the vacuum concept and supported the customer by programming and commissioning of a demo cluster in the course of a temporary employment agency.

MLAP 06The microlens array used here is an array with an area of 2.8 mm² and 280 lenses. We designed the electrical hardware architecture, programed the software , and made the electrical installation to position and bond the microlens array with a multi-axis control unit and optical image processing in 6 degrees of freedom up to 100 nm.

ResonantChargingUp to 15000 times per second a defined high voltage must be generated between two electrodes by resonant charging and discharged by trigger lasers. We have developed such a system from scratch and achieved unprecedented accuracy.

LTTB-2The Tin Handling Box (THB) is a core module in a Tin based LDP-SOURCE (see for this also the other projects about EUV-LDP-SOURCES). Before such a complex module is used for the first time or after a refurbishment, it must be tested in all operating phases from heating-up over operation to cooling down again. We have completely designed such a testbench and have already delivered it several times.

EBL2LayoutFrameTo operate an EUV LDP Source, a tin plasma must be generated and controlled in a high vacuum environment using high voltage. Together with our customer we have developed, built and programmed the entire environment of such an EUV source.

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