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Categories:: Design Software Assembly Machinery Manufacturing
To operate an EUV-LDP-Source, media and processes must be regulated and controlled in real time. In order to evaluate the hardware and software used for this purpose, a simulator is not only helpful but also saves enormous costs since the real machine is not occupied. For our customer we have developed such a simulator.
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Categories:: Design Software Assembly Machinery Manufacturing Engineering
The Tin Handling Box (THB) is a core module in a Tin based LDP-SOURCE (see for this also the other projects about EUV-LDP-SOURCES). Before such a complex module is used for the first time or after a refurbishment, it must be tested in all operating phases from heating-up over operation to cooling down again. We have completely designed such a testbench and have already delivered it several times.
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