VPD and OVPD (Organic - Vapor Phase Deposition) are technologies to produce organic electronics like OLEDs by deposit of special semiconductor materials. The Organic Electronic Cluster (OEC) is based on this technologies and offers a wide range of process modules needed in the field. We have taken over the vacuum concept and supported the customer by programming and commissioning of a demo cluster in the course of a temporary employment agency.

Creating a vacuum concept is always a great challenge, especially when high vacuum is involved. Transitions from normal pressure to high vacuum, gas-dependent sensors and transitions to other vacuum chambers are the big challenges to be solved.

With our experience from many other projects we have solved this challenges for our customer.



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