Our core competency is the customer-specific design, planning and project planning of prototypes and systems.

On the electrical/pneumatic side, we are increasingly working with the tool E-Plan – in step with all customer specifications and standards.

In mechanical construction, we use the Autodesk Inventor tool to cover a wide range of applications from the smallest components through to large systems.

Detail Engineering
E-Plan P8, Inventor

In line with CE (EN), NFPA (UL) and SEMI

Rapid Prototyping

3D Printing

With TPS (Test Procedure Specification) and TAR (Test Acceptance Report) if required
Electronics:   3.2 V .. 10 kV
Cooling:   100 W .. 25 kW
Vacuum:   10 .. 0.001 Pascal
Positioning accuracy:   50 µm ... 10 m


This assembly unit combines high precision, cycle time and product variety in one. We achieve the resulting quality through the sophisticated combination of image processing and robotic assembly.


This fully automated robot cell guarantees high quantities with consistent quality and combines multiple process steps such as gluing, joining, UV hardening and testing in one unit. 

MLAP 06The microlens array used here is an array with an area of 2.8 mm² and 280 lenses. We designed the electrical hardware architecture, programed the software , and made the electrical installation to position and bond the microlens array with a multi-axis control unit and optical image processing in 6 degrees of freedom up to 100 nm.

ResonantChargingUp to 15000 times per second a defined high voltage must be generated between two electrodes by resonant charging and discharged by trigger lasers. We have developed such a system from scratch and achieved unprecedented accuracy.

To operate an EUV-LDP-Source, media and processes must be regulated and controlled in real time. In order to evaluate the hardware and software used for this purpose, a simulator is not only helpful but also saves enormous costs since the real machine is not occupied. For our customer we have developed such a simulator.

LTTB-2The Tin Handling Box (THB) is a core module in a Tin based LDP-SOURCE (see for this also the other projects about EUV-LDP-SOURCES). Before such a complex module is used for the first time or after a refurbishment, it must be tested in all operating phases from heating-up over operation to cooling down again. We have completely designed such a testbench and have already delivered it several times.

EBL2LayoutFrameTo operate an EUV LDP Source, a tin plasma must be generated and controlled in a high vacuum environment using high voltage. Together with our customer we have developed, built and programmed the entire environment of such an EUV source.

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