Assembly

In an assembly space of over 300 m², we can produce all the required formats from the smallest assemblies to entire production lines.

The units are constructed by us mechanically, electrically and pneumatically, and then subsequently tested and commissioned.

Electrical

According to CE, SEMI or UL standards.
From wiring harnesses to control cabinets

Mechanical

Component size: mm .. x m
Weight bearing capacity (crane): 0 t .. 4.5 t
Accuracy: 50 µm .. x m

Services

Servicing
Maintenance
Telephone/Remote support
On-site support

Schnallenautomat

This assembly unit combines high precision, cycle time and product variety in one. We achieve the resulting quality through the sophisticated combination of image processing and robotic assembly.

Roboterzelle

This fully automated robot cell guarantees high quantities with consistent quality and combines multiple process steps such as gluing, joining, UV hardening and testing in one unit. 

MLAP 06The microlens array used here is an array with an area of 2.8 mm² and 280 lenses. We designed the electrical hardware architecture, programed the software , and made the electrical installation to position and bond the microlens array with a multi-axis control unit and optical image processing in 6 degrees of freedom up to 100 nm.

To operate an EUV-LDP-Source, media and processes must be regulated and controlled in real time. In order to evaluate the hardware and software used for this purpose, a simulator is not only helpful but also saves enormous costs since the real machine is not occupied. For our customer we have developed such a simulator.

LTTB-2The Tin Handling Box (THB) is a core module in a Tin based LDP-SOURCE (see for this also the other projects about EUV-LDP-SOURCES). Before such a complex module is used for the first time or after a refurbishment, it must be tested in all operating phases from heating-up over operation to cooling down again. We have completely designed such a testbench and have already delivered it several times.

EBL2LayoutFrameTo operate an EUV LDP Source, a tin plasma must be generated and controlled in a high vacuum environment using high voltage. Together with our customer we have developed, built and programmed the entire environment of such an EUV source.

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